LEYSPEC Cart 100 S
| 产品号 | 504901V001 |
| 探测器: | 法拉第杯 |
| 最大操作压力: | 1 x 10-4 mbar |
| 最小可检测分压: | 1 x 10-10 mbar |
| 灵敏度: | 1 x 10-5 A/mbar |
| 质量范围 (amu): | 1-100 |
| 质量过滤器: | 四极质谱仪(QMS) |
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LEYSPEC Cart 100 S
Mobile visibility
Experience unrivalled gas analysis with the Leybold LEYSPEC cart. The combination of a high performance pumping station TURBOLAB with a LEYSPEC residual gas analyzer offers efficient and flexible gas analysis, regardless of your pressure. Moreover it can be connected to any process using a fine-dosing UHV valve. Bakeout is now possible through the all-metal construction which allows a clean operation during residual gas analysis. Thus, you can perform it wherever needed, being fully mobile for many processes and applications.
ADVANTAGES AT A GLANCE
- Pumping system with turbo pump TURBOVAC 250 i and dry backing pump SCROLLVAC 7 plus for quick measurement readiness
- Integrated process control via the TURBOLAB pumping station
- Very easy and intuitive operation via the LEYSPEC software
- Mobile residual gas analysis at any point of your process or chamber
- Bakeable to fully focus on your process gases
- Pressure independent residual gas analysis – even under atmospheric pressure
